氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)的(de)(de)(de)結(jie)構(gou)及工(gong)作(zuo)原(yuan)(yuan)理(li)　　氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)（Gas Phase Deposition Furnace）是(shi)一種(zhong)(zhong)用(yong)(yong)(yong)(yong)于(yu)(yu)材(cai)料(liao)(liao)薄(bo)膜(mo)生(sheng)(sheng)長(chang)(chang)的(de)(de)(de)實驗設備，常(chang)(chang)(chang)用(yong)(yong)(yong)(yong)于(yu)(yu)半導體(ti)、光電(dian)子(zi)、納米科技(ji)等(deng)(deng)領域。下(xia)(xia)面是(shi)氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)的(de)(de)(de)基本結(jie)構(gou)和(he)(he)(he)工(gong)作(zuo)原(yuan)(yuan)理(li)的(de)(de)(de)簡(jian)要說明：　　氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)結(jie)構(gou)：　　氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)通(tong)(tong)(tong)(tong)(tong)常(chang)(chang)(chang)由以下(xia)(xia)幾個主要組成(cheng)(cheng)部分(fen)(fen)構(gou)成(cheng)(cheng)：　　1.反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)（Reaction Chamber）：用(yong)(yong)(yong)(yong)于(yu)(yu)放置(zhi)材(cai)料(liao)(liao)襯(chen)(chen)底（Substrate）以及執(zhi)行(xing)(xing)反(fan)(fan)應(ying)(ying)(ying)的(de)(de)(de)區域。反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)通(tong)(tong)(tong)(tong)(tong)常(chang)(chang)(chang)是(shi)一個密封的(de)(de)(de)金屬腔(qiang)體(ti)，具(ju)有高(gao)溫(wen)(wen)抗腐(fu)蝕性能(neng)。　　2.加(jia)熱(re)(re)(re)(re)系統(tong)(tong)（Heating System）：用(yong)(yong)(yong)(yong)于(yu)(yu)提(ti)供(gong)(gong)反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)內的(de)(de)(de)高(gao)溫(wen)(wen)環境(jing)。加(jia)熱(re)(re)(re)(re)系統(tong)(tong)通(tong)(tong)(tong)(tong)(tong)常(chang)(chang)(chang)采用(yong)(yong)(yong)(yong)電(dian)阻(zu)加(jia)熱(re)(re)(re)(re)或(huo)(huo)感(gan)應(ying)(ying)(ying)加(jia)熱(re)(re)(re)(re)的(de)(de)(de)方(fang)式，通(tong)(tong)(tong)(tong)(tong)過(guo)加(jia)熱(re)(re)(re)(re)元件(jian)（比如加(jia)熱(re)(re)(re)(re)線圈）提(ti)供(gong)(gong)熱(re)(re)(re)(re)源。　　3.氣(qi)(qi)(qi)(qi)(qi)體(ti)供(gong)(gong)應(ying)(ying)(ying)系統(tong)(tong)（Gas Supply System）：用(yong)(yong)(yong)(yong)于(yu)(yu)控(kong)制(zhi)和(he)(he)(he)提(ti)供(gong)(gong)反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)內所(suo)(suo)需(xu)的(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)體(ti)混合(he)物(wu)(wu)。氣(qi)(qi)(qi)(qi)(qi)體(ti)供(gong)(gong)應(ying)(ying)(ying)系統(tong)(tong)通(tong)(tong)(tong)(tong)(tong)常(chang)(chang)(chang)包括多個氣(qi)(qi)(qi)(qi)(qi)體(ti)進(jin)口、流量控(kong)制(zhi)器和(he)(he)(he)混合(he)裝置(zhi)等(deng)(deng)。　　4.排(pai)(pai)氣(qi)(qi)(qi)(qi)(qi)系統(tong)(tong)（Exhaust System）：用(yong)(yong)(yong)(yong)于(yu)(yu)排(pai)(pai)除反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)內產(chan)生(sheng)(sheng)的(de)(de)(de)廢氣(qi)(qi)(qi)(qi)(qi)和(he)(he)(he)雜質。排(pai)(pai)氣(qi)(qi)(qi)(qi)(qi)系統(tong)(tong)通(tong)(tong)(tong)(tong)(tong)常(chang)(chang)(chang)包括真空泵和(he)(he)(he)廢氣(qi)(qi)(qi)(qi)(qi)處理(li)裝置(zhi)等(deng)(deng)。　　5.控(kong)制(zhi)系統(tong)(tong)（Control System）：用(yong)(yong)(yong)(yong)于(yu)(yu)對爐(lu)子(zi)的(de)(de)(de)溫(wen)(wen)度(du)、氣(qi)(qi)(qi)(qi)(qi)體(ti)流量等(deng)(deng)參數進(jin)行(xing)(xing)實時監控(kong)和(he)(he)(he)調(diao)(diao)節(jie)(jie)。　　氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)工(gong)作(zuo)原(yuan)(yuan)理(li)：　　氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)的(de)(de)(de)工(gong)作(zuo)原(yuan)(yuan)理(li)是(shi)利用(yong)(yong)(yong)(yong)熱(re)(re)(re)(re)分(fen)(fen)解(jie)(jie)或(huo)(huo)化(hua)學反(fan)(fan)應(ying)(ying)(ying)將(jiang)氣(qi)(qi)(qi)(qi)(qi)體(ti)源中(zhong)的(de)(de)(de)原(yuan)(yuan)料(liao)(liao)分(fen)(fen)子(zi)在高(gao)溫(wen)(wen)環境(jing)下(xia)(xia)轉(zhuan)化(hua)為可沉(chen)積(ji)(ji)(ji)的(de)(de)(de)材(cai)料(liao)(liao)薄(bo)膜(mo)。具(ju)體(ti)步(bu)驟如下(xia)(xia)：　　1.襯(chen)(chen)底放置(zhi)：將(jiang)待(dai)生(sheng)(sheng)長(chang)(chang)的(de)(de)(de)襯(chen)(chen)底放置(zhi)在反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)中(zhong)的(de)(de)(de)加(jia)熱(re)(re)(re)(re)區域，通(tong)(tong)(tong)(tong)(tong)常(chang)(chang)(chang)通(tong)(tong)(tong)(tong)(tong)過(guo)夾持裝置(zhi)固定(ding)。　　2.加(jia)熱(re)(re)(re)(re)預處理(li)：加(jia)熱(re)(re)(re)(re)系統(tong)(tong)提(ti)供(gong)(gong)熱(re)(re)(re)(re)源，將(jiang)反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)內的(de)(de)(de)溫(wen)(wen)度(du)升至所(suo)(suo)需(xu)的(de)(de)(de)生(sheng)(sheng)長(chang)(chang)溫(wen)(wen)度(du)。此過(guo)程通(tong)(tong)(tong)(tong)(tong)常(chang)(chang)(chang)在惰性氣(qi)(qi)(qi)(qi)(qi)氛下(xia)(xia)進(jin)行(xing)(xing)，以排(pai)(pai)除氧(yang)氣(qi)(qi)(qi)(qi)(qi)和(he)(he)(he)其他(ta)雜質。　　3.氣(qi)(qi)(qi)(qi)(qi)體(ti)供(gong)(gong)應(ying)(ying)(ying)和(he)(he)(he)反(fan)(fan)應(ying)(ying)(ying)：氣(qi)(qi)(qi)(qi)(qi)體(ti)供(gong)(gong)應(ying)(ying)(ying)系統(tong)(tong)控(kong)制(zhi)并提(ti)供(gong)(gong)所(suo)(suo)需(xu)的(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)體(ti)混合(he)物(wu)(wu)，其通(tong)(tong)(tong)(tong)(tong)過(guo)進(jin)入(ru)反(fan)(fan)應(ying)(ying)(ying)室(shi)(shi)(shi)與襯(chen)(chen)底表(biao)面發生(sheng)(sheng)化(hua)學反(fan)(fan)應(ying)(ying)(ying)或(huo)(huo)熱(re)(re)(re)(re)分(fen)(fen)解(jie)(jie)，產(chan)生(sheng)(sheng)可沉(chen)積(ji)(ji)(ji)的(de)(de)(de)物(wu)(wu)種(zhong)(zhong)。　　4.材(cai)料(liao)(liao)沉(chen)積(ji)(ji)(ji)：沉(chen)積(ji)(ji)(ji)物(wu)(wu)種(zhong)(zhong)在襯(chen)(chen)底表(biao)面吸附(fu)并形(xing)成(cheng)(cheng)一層(ceng)薄(bo)膜(mo)。其形(xing)貌、結(jie)構(gou)和(he)(he)(he)性質可通(tong)(tong)(tong)(tong)(tong)過(guo)控(kong)制(zhi)溫(wen)(wen)度(du)、氣(qi)(qi)(qi)(qi)(qi)體(ti)流量和(he)(he)(he)沉(chen)積(ji)(ji)(ji)時間等(deng)(deng)參數來調(diao)(diao)節(jie)(jie)。　　5.冷(leng)卻(que)和(he)(he)(he)取出：完成(cheng)(cheng)材(cai)料(liao)(liao)沉(chen)積(ji)(ji)(ji)后(hou)，可關閉氣(qi)(qi)(qi)(qi)(qi)體(ti)供(gong)(gong)應(ying)(ying)(ying)和(he)(he)(he)加(jia)熱(re)(re)(re)(re)系統(tong)(tong)，讓襯(chen)(chen)底緩慢冷(leng)卻(que)。待(dai)冷(leng)卻(que)至安全溫(wen)(wen)度(du)后(hou)，可以取出生(sheng)(sheng)長(chang)(chang)的(de)(de)(de)薄(bo)膜(mo)。　　需(xu)要注意的(de)(de)(de)是(shi)，具(ju)體(ti)的(de)(de)(de)氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)爐(lu)工(gong)作(zuo)原(yuan)(yuan)理(li)會(hui)因(yin)不同類(lei)型(xing)的(de)(de)(de)沉(chen)積(ji)(ji)(ji)方(fang)法（如化(hua)學氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)、物(wu)(wu)理(li)氣(qi)(qi)(qi)(qi)(qi)相(xiang)(xiang)沉(chen)積(ji)(ji)(ji)等(deng)(deng)）和(he)(he)(he)所(suo)(suo)研(yan)究的(de)(de)(de)材(cai)料(liao)(liao)而有所(suo)(suo)不同。上述僅(jin)為一般(ban)的(de)(de)(de)工(gong)作(zuo)原(yuan)(yuan)理(li)示意，實際操作(zuo)中(zhong)需(xu)根據具(ju)體(ti)情(qing)況進(jin)行(xing)(xing)參數調(diao)(diao)節(jie)(jie)和(he)(he)(he)設備操作(zuo)。

　　真(zhen)(zhen)(zhen)(zhen)空(kong)燒結(jie)爐(lu)(lu)具備(bei)(bei)多功能性嗎(ma) 　　真(zhen)(zhen)(zhen)(zhen)空(kong)燒結(jie)爐(lu)(lu)主(zhu)(zhu)要(yao)用(yong)于(yu)(yu)各(ge)種(zhong)(zhong)金(jin)(jin)(jin)屬(shu)(shu)材(cai)(cai)料(liao)(liao)在(zai)真(zhen)(zhen)(zhen)(zhen)空(kong)或氣(qi)氛保(bao)護條件下(xia)(xia)的(de)(de)(de)感(gan)應熔(rong)(rong)(rong)煉(lian)(lian)及(ji)快冷甩帶成型(xing);適合(he)(he)各(ge)種(zhong)(zhong)材(cai)(cai)料(liao)(liao)的(de)(de)(de)非(fei)晶(jing)、微(wei)晶(jing)薄(bo)帶或薄(bo)片(pian)的(de)(de)(de)制(zhi)備(bei)(bei)。 　　實(shi)驗型(xing)采用(yong)冷滾旋淬法制(zhi)備(bei)(bei)薄(bo)片(pian)或薄(bo)帶非(fei)晶(jing)材(cai)(cai)料(liao)(liao)。采用(yong)噴(pen)鑄(zhu)法制(zhi)備(bei)(bei)塊狀(zhuang)或棒狀(zhuang)合(he)(he)金(jin)(jin)(jin)試樣(yang)，可(ke)(ke)用(yong)于(yu)(yu)制(zhi)備(bei)(bei)大塊非(fei)晶(jing)材(cai)(cai)料(liao)(liao)。真(zhen)(zhen)(zhen)(zhen)空(kong)燒結(jie)爐(lu)(lu)主(zhu)(zhu)要(yao)由真(zhen)(zhen)(zhen)(zhen)空(kong)腔體、熔(rong)(rong)(rong)煉(lian)(lian)裝置、噴(pen)鑄(zhu)裝置、甩帶裝置、抽真(zhen)(zhen)(zhen)(zhen)空(kong)系(xi)統(tong)(tong)、爐(lu)(lu)體支架(jia)、電氣(qi)控制(zhi)系(xi)統(tong)(tong)、水冷卻系(xi)統(tong)(tong)等(deng)組成。 　　真(zhen)(zhen)(zhen)(zhen)空(kong)燒結(jie)爐(lu)(lu)采用(yong)臥(wo)式爐(lu)(lu)體，側部開(kai)門(men)結(jie)構，進(jin)(jin)出料(liao)(liao)方便，爐(lu)(lu)體結(jie)構緊湊，占地(di)空(kong)間較小，采用(yong)高頻(pin)電源加熱，主(zhu)(zhu)要(yao)供(gong)大專院校及(ji)科(ke)研單(dan)位(wei)等(deng)在(zai)真(zhen)(zhen)(zhen)(zhen)空(kong)或保(bao)護氣(qi)氛條件下(xia)(xia)對(dui)金(jin)(jin)(jin)屬(shu)(shu)材(cai)(cai)料(liao)(liao)(如不銹(xiu)鋼(gang)、鎳基(ji)合(he)(he)金(jin)(jin)(jin)、銅、合(he)(he)金(jin)(jin)(jin)鋼(gang)、鎳鈷合(he)(he)金(jin)(jin)(jin)、稀土(tu)釹鐵錋等(deng))的(de)(de)(de)熔(rong)(rong)(rong)煉(lian)(lian)澆(jiao)鑄(zhu)處理，也可(ke)(ke)進(jin)(jin)行(xing)(xing)合(he)(he)金(jin)(jin)(jin)鋼(gang)的(de)(de)(de)真(zhen)(zhen)(zhen)(zhen)空(kong)精煉(lian)(lian)處理及(ji)精密鑄(zhu)造。還可(ke)(ke)進(jin)(jin)行(xing)(xing)非(fei)晶(jing)甩帶，噴(pen)鑄(zhu)和壓鑄(zhu)處理，一臺設(she)備(bei)(bei)多種(zhong)(zhong)功能。 　　此外，真(zhen)(zhen)(zhen)(zhen)空(kong)燒結(jie)爐(lu)(lu)是(shi)在(zai)抽完(wan)真(zhen)(zhen)(zhen)(zhen)空(kong)并充氫(qing)氣(qi)的(de)(de)(de)保(bao)護狀(zhuang)態下(xia)(xia)，利(li)用(yong)中(zhong)頻(pin)感(gan)應的(de)(de)(de)加熱原(yuan)理，使(shi)處于(yu)(yu)線圈內(nei)的(de)(de)(de)鎢(wu)坩堝產(chan)生了高溫(wen)，再通過熱輻射傳導(dao)到工(gong)作上，適用(yong)于(yu)(yu)科(ke)研、及(ji)軍工(gong)單(dan)位(wei)對(dui)難熔(rong)(rong)(rong)合(he)(he)金(jin)(jin)(jin)如鎢(wu)、鉬以及(ji)其它合(he)(he)金(jin)(jin)(jin)的(de)(de)(de)粉(fen)末(mo)成型(xing)燒結(jie)。在(zai)真(zhen)(zhen)(zhen)(zhen)空(kong)保(bao)護的(de)(de)(de)條件下(xia)(xia)，利(li)用(yong)中(zhong)頻(pin)感(gan)應加熱的(de)(de)(de)原(yuan)理使(shi)硬質合(he)(he)金(jin)(jin)(jin)刀頭(tou)及(ji)各(ge)種(zhong)(zhong)金(jin)(jin)(jin)屬(shu)(shu)粉(fen)末(mo)壓制(zhi)體實(shi)現燒結(jie)的(de)(de)(de)成套設(she)備(bei)(bei)，是(shi)為硬質合(he)(he)金(jin)(jin)(jin)、金(jin)(jin)(jin)屬(shu)(shu)鏑、陶瓷材(cai)(cai)料(liao)(liao)的(de)(de)(de)工(gong)業行(xing)(xing)業而生產(chan)設(she)計的(de)(de)(de)。